High fidelity 3D NIL replication demonstrated with micro resist technology

Nanoimprint lithography (NIL) is one of the most promising technology platforms for generating 3D topographies by replication at micro- and nanometer scale with extremely high resolution and throughput. Commercial applications in micro-nano optics include diffractive and refractive optical elements, security features, micro-fluidics and life-sciences. One of the remaining challenges of NIL is the fabrication of […]

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Frater Award for Dr. Hemayat Uddin

Congratulations to Dr. Hemayat Uddin from the Melbourne Center for Nanofabrication (MCN) for receiving the Frater Award from the Australian National Fabrication Facility (ANFF). The award covers a research and training visit abroad which Dr. Uddin used to visit SwissLitho in Zurich. He worked successfully with the SwissLitho scientists and engineers in March to realize […]

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3DNano2Micro – deep patterns in Silicon now possible

While direct grayscale writing is one of the key benefits of NanoFrazor lithography, the shape of the NanoFrazor tip limits the achievable patterning depth in the resist. However, when the application requires deeper structures than can be written, the pattern can be amplified during the pattern transfer step. A new joint paper by EPFL and SwissLitho […]

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Another successful thermal probe workshop

The annual Thermal Probe Workshop, co-organized by SwissLitho and IBM Zurich took place again in Zürich for the 4th year in a row. The workshop saw an increased participation this year with around 70 attendees from all over the world. Renowned experts in the field of thermal probes presented their exciting new research, resulting in some very […]

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New PostDoc

SwissLitho has recently sponsored the first SwissLitho Postdoctoral Fellowship for Advanced Nanofabrication Scanning Probe Methods. The research position is focused on the use of the NanoFrazor, located in the Advanced Science Research Center (ASRC) in Manhattan, New York City. The ASRC is a new $350M research institute of the City University of New York with […]

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Machine installation at CUNY Advanced Science Research Center (ASRC)

Since early November, the CUNY Advanced Science Research Center (ASRC) in Manhattan is home of a NanoFrazor Explore. Principal investigator Elisa Riedo, one the very early and best known pioneers of thermal probe lithography, will use the NanoFrazor technology for a wide range of new patterning ideas and applications. Several other groups in New York, like […]

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Machine installation at Melbourne Centre of Nanofabrication

The first NanoFrazor system in Australia was successfully installed in the Melbourne Centre for Nanofabrication (MCN) where it will be used, among other things, to fabricate high-electron-mobility transistors (HEMTs) as emitters and detectors in terahertz devices. Read more about this story here.

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Machine Installation at Beihang University, Beijing

Last week, the first NanoFrazor system in Asia was successfully installed in China. Researchers from the Beihang University are already excited to use the NanoFrazor Explore for fundamental research of emerging spintronic memory and logic devices, particularly on new structures of magnetic tunnel junction (MTJ) and spin valves.

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Thermal probe community meets again

For the third year in a row, the Thermal Probe Workshop organized by SwissLitho and IBM Research, took place in Zurich. Continuing the trend of last year’s event, we had again a very exciting and diverse program with renowned international speakers. They presented their latest results with thermal probes and beyond facilitating discussions about new fascinating possibilities. […]

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Collaboration with TNO

SwissLitho started collaboration with TNO in Delft to evaluate if the NanoFrazor technology can be implemented in the wafer-level parallel AFM metrology system of TNO. This principle would increase the throughput of the NanoFrazor towards industrial applications. This principle would increase the throughput of the NanoFrazor towards industrial applications. You can get an impression of the system of […]

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