EV Group and SwissLitho to Develop Joint Nanoimprint Lithography Solution for 3D Optical Structures with Single-Nanometer Accuracy

First-of-its-kind solution combines high resolution and 3D printing capabilities of SwissLitho NanoFrazor system with high throughput and cost-effectiveness of EVG’s SmartNIL® technology ST. FLORIAN, Austria and ZURICH, Switzerland, October 9, 2017—EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, and SwissLitho AG, a manufacturer of […]

Read more»

NanoFrazor Explore in the Utah Nanofab

The Utah Nanofab at the University of Utah in Salt Lake City is home of a NanoFrazor Explore since the end of August. Prof. Pierre-Emmanuel Gaillardon lead the successful grant application to purchase the NanoFrazor for the University of Utah. The NanoFrazor Explore will be used by several research groups for nanowire applications and the fabrication of […]

Read more»

First installation of a NanoFrazor Scholar

The NanoFrazor Scholar is our newest NanoFrazor system, available only since this year. We are happy to announce that the first NanoFrazor Scholar system was recently installed successfully in Dresden, Germany, at the Leibniz Institute for Solid State and Materials Research in the Institute for Metallic Materials (IMW). The group “Quantum Materials and Devices” PD Dr. Andy Thomas […]

Read more»

Outlook from our R&D team: two ways to increase the throughput

In a recent conference proceeding, we demonstrate two approaches for increasing the NanoFrazor patterning throughput: the integrated laser writer – Direct Laser Sublimation (DLS) unit and the Decapede cantilever array. Both prototypes have been developed in the framework of the European project “Single Nanometer Manufacturing” which was finished earlier this year. Check out the paper here for some […]

Read more»

Understanding the tip heating mechanism

We invest heavily in obtaining a deeper understanding of our thermal cantilever technology in order to further improve our future cantilever designs. For this purpose, we developed advanced simulations of the electrical, mechanical and thermal properties of the cantilevers and compared them with accurate experiments. We published our exciting findings about the complex heating mechanisms of the thermal […]

Read more»

First Thermal Probe Workshop in China

The first Thermal Probe Workshop in China was co-organized by our partner – Quantum Design and Prof. Zhao – the first NanoFrazor customer in China. The workshop, which took place in Fert Beijing Institute in Beihang University had 20 researchers and students from Beijing, Haerbin, Changchun and Nanjing despite the heavy rain that day. After […]

Read more»

High fidelity 3D NIL replication demonstrated with micro resist technology

Nanoimprint lithography (NIL) is one of the most promising technology platforms for generating 3D topographies by replication at micro- and nanometer scale with extremely high resolution and throughput. Commercial applications in micro-nano optics include diffractive and refractive optical elements, security features, micro-fluidics and life-sciences. One of the remaining challenges of NIL is the fabrication of […]

Read more»

Frater Award for Dr. Hemayat Uddin

Congratulations to Dr. Hemayat Uddin from the Melbourne Center for Nanofabrication (MCN) for receiving the Frater Award from the Australian National Fabrication Facility (ANFF). The award covers a research and training visit abroad which Dr. Uddin used to visit SwissLitho in Zurich. He worked successfully with the SwissLitho scientists and engineers in March to realize […]

Read more»

3DNano2Micro – deep patterns in Silicon now possible

While direct grayscale writing is one of the key benefits of NanoFrazor lithography, the shape of the NanoFrazor tip limits the achievable patterning depth in the resist. However, when the application requires deeper structures than can be written, the pattern can be amplified during the pattern transfer step. A new joint paper by EPFL and SwissLitho […]

Read more»

Another successful thermal probe workshop

The annual Thermal Probe Workshop, co-organized by SwissLitho and IBM Zurich took place again in Zürich for the 4th year in a row. The workshop saw an increased participation this year with around 70 attendees from all over the world. Renowned experts in the field of thermal probes presented their exciting new research, resulting in some very […]

Read more»