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3rd Thermal Probe Workshop

January 21, 2016 - January 22, 2016

Technopark Zurich, 21.-22. January 2016

Co-organized by SwissLitho and IBM Research Zurich



Thursday, 21st January 2016
09.30 – 10.50Session I
Chair: Felix Holzner
09.30 – 09.40
09.40 – 10.10Nanofabrication at Age 55 – strong as ever
Dieter Kern, University of Tübingen
10.10 – 10.30Single nanometer lithography in 2D and 3D using heatable scanning probes
Colin Rawlings, IBM Research Zurich
10.30 – 10.50Lift-off Processes for Thermal Scanning Probe Lithography
Simon Bonanni, SwissLitho
10.50 – 11.20Break, coffee & snacks – Poster area
11:20 – 12:50Session II
Chair: Stefan Weber
11:20 - 11:50Scanning Probe Microscope as a Lab on an Instrument for Industrial application
Hamed Sadeghian, TNO Delft
11.50 – 12.10Towards the MultiTip NanoFrazor
Emine Cagin, NTB Buchs
12.10 – 12.30Towards sub-10 nm nodes by EUV lithography
Tero Kulmala, Paul-Scherrer Institute
12.30 – 12.50Next Generation of Maskless Lithography
Théophane Besson, Heidelberg Instruments
12.50 – 14.00Lunch
Technopark Cafeteria
14.00 – 15.30Session III
Chair: Philip Paul
14.00 – 14.30Resistless Nanofabrication by Stencil Lithography
Jürgen Brugger, EPFL
14.30 – 14.50PPA as commercial resist for advanced lithography
Felix Holzner, SwissLitho
14.50 – 15.10High aspect ratio nanoscale-to-microscale 3D silicon patterns by thermal scanning probe lithography
Yuliya Lisunova, EPFL
15.10 – 15.30Fabrication of ultra-thin suspended silicon nanowires
Jordi Llobet, IMB-CNM Barcelona
15.30 – 16.00Break, coffee & snacks – Poster area
16.00 – 17.00Young Researcher Idea Competition – Award Ceremony
Jury: Peter Vettiger, Dieter Kern, Nico de Rooij
16.10 – 16.20Finalist 1: Three-dimensional phase plates for transmission electron microscopy
Simon Hettler (Karlsruhe Institute of Technology)
16.20 – 16.30Finalist 2: Nano security features using fluorescent supramolecular glassy materials
Diederik Balkenende (Adolphe Merkle Institute) & Samuel Zimmermann (EPFL)
16.30 – 16.40Finalist 3: Controlled nanometric recrystallization of amorphized and implanted semiconductors
Matteo Lorenzoni Galizia (IMB-CNM Barcelona) & Jordi Llobet (IMB-CNM Barcelona)
17.45Departure to social evening event at Lindt & Sprüngli
Shuttle service leaves from the main entrance of Technopark
Friday, 22nd January 2016
09.00 – 10.30Session IV
Chair: Armin Knoll
09.00 – 09.30Modulating the electronic properties of 2D materials with thermal probes
Paul Sheehan, U.S. Naval Research Laboratories
09.30 – 09.50Chemical patterning with thermal probes for studying charge binding interaction pertaining to DNA and particle assembly
Urs Dürig, IBM Research Zurich
09.50 – 10.10Nanoparticle Brownian Motors fabricated by Thermal Scanning Probe Lithography
Stefan Fringes, IBM Research Zurich
10.10 – 10.30Scanning probes for directed self-assembly of PMMA/PS based Block-Copolymers
Matteo Lorenzoni Galizia, IMB-CNM Barcelona
10.30 – 11.00Break, coffee & snacks – Poster area
11.00 – 12.30 Session V
Chair: Bernd Gotsmann
11.00 – 11.30Imaging and Understanding Atomic-scale Adhesion and Wear: Quantitative Investigations Using In Situ Electron Microscopy
Tevis Jacobs, University of Pittsburgh
11.30 – 11.50Characterization of NanoFrazor cantilevers
Martin Spieser, SwissLitho
11.50 – 12.10Scanning Probe Thermometry
Fabian Menges, IBM Research Zurich
12.10 – 12.30Accurate measurement of near-field thermal radiation
Roy Bijster, Delft University of Technology
12.30 – 13.30 Lunch
Technopark Cafeteria
13.30 – 15.00Session VI
Chair: Urs Dürig
13.30 – 14.00 NanoFrazor in an open access University Nanofab, neuronal manipulations and other AFM applications
Peter Grütter, McGill University
14.00 – 14.20Bacterial traps: simultaneous AFM and fluorescence analysis of bacteria with various shapes
Oliver Peric, EPFL
14.20 – 14.40Direct fabrication and electrical response of thin layer WSe2 nanoscale transistors by oxidation scanning probe lithography
Yu Kyoung Ryu, Instituto de Ciencia de Materiales de Madrid CSIC
14.40 – 15.00Closing remarks
15.00 – openMeetings and discussions
Several meeting rooms are available for meetings and discussions; please use the blackboard in the conference room for scheduling.
Coffee & snacks provided


In addition, the winners of the “Young Researcher Idea Competition” will present their creative ideas for novel applications of thermal probes.


NanoFrazor hands-on trials

There is the chance to test the NanoFrazor by yourself. Short sessions will be during the breaks and during the poster sessions.


Workshop abstract submission

You are cordially invited to contribute to the workshop with a presentation.
If you would like to do so, please submit the title and a short abstract of your presentation in our registration form.



Technopark Zurich
Technoparkstrasse 1
CH-8005 Zürich

Conference Room Pascal, 3rd floor Darwin-Wing



Note: Limited number of participants. Please register before 19.01.2016.



  • Full package: 450 CHF (2day workshop incl. lunches & social event on 21.01.)
  • Workshop only: 360 CHF (2day workshop incl. lunches)
  • One day: 220 CHF (first or second workshop day incl. lunch)
  • Social event: 180 CHF
  • Invited speakers: 0 CHF


Social event on Thursday, 21.01.










Discover with us the secrets of the best Maître Chocolatiers in Switzerland at Lindt & Sprüngli and create our own truffles and pralines; afterwards typical Swiss dinner at the lake of Zurich.


  • 17:45 Transfer from Technopark to Lindt & Sprüngli (busses will be organised)
  • 18:30 Maître Chocolatiers chocolate course
  • 20:30 Traditional Swiss dinner at the lake (Restaurant Chez Fritz, individual return to Zurich city)



Optional side event on Saturday, 23.01.

One day skiing and sledging at Engelberg (on own expenses, trip will be organized by SwissLitho)




For your stay in Zurich we would like to recommend you the Ibis Hotel Zurich West or the 25hours Hotel Zurich West. Both hotels are just next to the Technopark. Early booking is recommended.




Felix Holzner
Armin Knoll

For questions regarding the registration and travel:
Lina Hildebrand


January 21, 2016
January 22, 2016
Event Category:


SwissLitho AG
Technoparkstrasse 1 Zurich 8005 Switzerland