First-of-its-kind solution combines high resolution and 3D printing capabilities of SwissLitho NanoFrazor system with high throughput and cost-effectiveness of EVG's SmartNIL® technology ST. FLORIAN, Austria and ZURICH, Switzerland, October 9, 2017—EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, and SwissLitho AG, a manufacturer of novel nanolithography tools, today announced a joint solution to enable the production of 3D structures down to the single-nanometer scale. Initially demonstrated within the “Single Nanometer Manufacturing for Beyond CMOS Devices (SNM)” project funded by the Seventh Framework Program of the European Union, the joint…
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The Utah Nanofab at the University of Utah in Salt Lake City is home of a NanoFrazor Explore since the end of August. Prof. Pierre-Emmanuel Gaillardon lead the successful grant application to purchase the NanoFrazor for the University of Utah. The NanoFrazor Explore will be used by several research groups for nanowire applications and the fabrication of other nano-devices.
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The NanoFrazor Scholar is our newest NanoFrazor system, available only since this year. We are happy to announce that the first NanoFrazor Scholar system was recently installed successfully in Dresden, Germany, at the Leibniz Institute for Solid State and Materials Research in the Institute for Metallic Materials (IMW). The group "Quantum Materials and Devices" PD Dr. Andy Thomas specializes in nanomagnetic layers, semiconductor nanowires and artificial synapses. The Scholar is planned to be used for fabricating magnetic tunnel junctions and nanowire-based devices. The unique In-situ imaging, markless overlay and stitching features of the NanoFrazor will enable the fabrication of such devices through a much simpler…
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In a recent conference proceeding, we demonstrate two approaches for increasing the NanoFrazor patterning throughput: the integrated laser writer - Direct Laser Sublimation (DLS) unit and the Decapede cantilever array. Both prototypes have been developed in the framework of the European project "Single Nanometer Manufacturing" which was finished earlier this year. Check out the paper here for some insights into the future add-on features for the NanoFrazor Explore and the NanoFrazor Professional systems.
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We invest heavily in obtaining a deeper understanding of our thermal cantilever technology in order to further improve our future cantilever designs. For this purpose, we developed advanced simulations of the electrical, mechanical and thermal properties of the cantilevers and compared them with accurate experiments. We published our exciting findings about the complex heating mechanisms of the thermal cantilevers in the Journal of Applied Physics. If you want to learn the details about the heating mechanism and the temperature calibration of the NanoFrazor cantilevers, we refer you to our recent publication here.
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The first Thermal Probe Workshop in China was co-organized by our partner - Quantum Design and Prof. Zhao - the first NanoFrazor customer in China. The workshop, which took place in Fert Beijing Institute in Beihang University had 20 researchers and students from Beijing, Haerbin, Changchun and Nanjing despite the heavy rain that day. After the presentations and discussions, Dr. Colin Rawlings from SwissLitho demonstrated overlay of electrodes on nanowires which are randomly spread over the substrate. All participants were impressed by the simple and straight forward process to pattern the electrodes with the NanoFrazor. Many new ideas were raised…
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Nanoimprint lithography (NIL) is one of the most promising technology platforms for generating 3D topographies by replication at micro- and nanometer scale with extremely high resolution and throughput. Commercial applications in micro-nano optics include diffractive and refractive optical elements, security features, micro-fluidics and life-sciences. One of the remaining challenges of NIL is the fabrication of high quality 3D master originals - the initial single patterns that are replicated multiple times during mass production. In collaboration with micro resist technology GmbH, we have recently demonstrated how complex 3D topographies patterned by NanoFrazor lithography can successfully be replicated at high fidelity in…
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Congratulations to Dr. Hemayat Uddin from the Melbourne Center for Nanofabrication (MCN) for receiving the Frater Award from the Australian National Fabrication Facility (ANFF). The award covers a research and training visit abroad which Dr. Uddin used to visit SwissLitho in Zurich. He worked successfully with the SwissLitho scientists and engineers in March to realize several new applications using the NanoFrazor. He and his colleagues in Melbourne will now apply the newly developed patterning methods with their own NanoFrazor at MCN and expect to publish some high impact publications soon.
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While direct grayscale writing is one of the key benefits of NanoFrazor lithography, the shape of the NanoFrazor tip limits the achievable patterning depth in the resist. However, when the application requires deeper structures than can be written, the pattern can be amplified during the pattern transfer step. A new joint paper by EPFL and SwissLitho investigates a combination of NanoFrazor patterning and pattern amplification by dry etching. Remarkably, the patterns can be amplified by a factor of up to 100 by using an oxide hard mask intermediate layer below the resist. An etch depth of up to 4 micrometers in…
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The annual Thermal Probe Workshop, co-organized by SwissLitho and IBM Zurich took place again in Zürich for the 4th year in a row. The workshop saw an increased participation this year with around 70 attendees from all over the world. Renowned experts in the field of thermal probes presented their exciting new research, resulting in some very interesting discussions and exchange of ideas. The full program of the workshop can be found here. Like every year, we had an interesting social event planned alongside the technical sessions. The workshop participants were treated to a memorable sunset cruise on lake Zürich while enjoying a Fondue…
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