New publication: www.nature.com. SwissLitho engineers have collaborated with scientists at the IBM Zurich Research Laboratory to fabricate pairs of interacting optical cavities – so called “photonic molecules”. Using NanoFrazor technology, pairs of cavities were fabricated with precisely controlled interaction strength.  Establishing this control over the interaction strength is a key milestone on the road towards quantum computations using arrays of such cavities. The successful fabrication of the cavities exploited the NanoFrazor technology’s unique ability to perform high resolution 3D grayscale lithography.  The NanoFrazor closed-loop lithography approach was improved to achieve not only sub-nanometer resolution, but also sub-nanometer absolute accuracy in the…
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Swiss Excellence Award

November 13, 2017  


SwissLitho received the „SWISS EXCELLENCE Product Award“ for the development and commercialization of the NanoFrazor. The award honors “unique, technological demanding and qualitatively superior projects in which an outstanding and extraordinary product innovation with a high potential for value creation was researched and successfully marketed.” The prestigious award was presented to a delegation of SwissLitho on the 13th of November in front of a large audience at the award ceremony in downtown Zurich.
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Our early customers from ETH Zurich and EPFL Lausanne recently received major funding for their research ideas involving the NanoFrazor. Prof. Jürg Leuthold from ETH Zürich will set up the “Centre for Single-Atom Electronics and Photonics” for which he received a donation of 12 million CHF by the Werner Siemens-Foundation. The NanoFrazor at ETH plays a key role for their ideas and was used to convince the foundation with the realization of very promising prototypes and by demonstrating the capabilities of the NanoFrazor live during the foundation’s evaluation visit. Prof. Jürgen Brugger from EPFL Lausanne received 2.5 million EUR with…
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The first NanoFrazor Explore in Korea was installed in the Lab for NanoBio-matErials & SpinTronics (nBEST) at DGIST in Daegu. The group’s research focuses on the design and fabrication of magnetoresistive sensors from various viewpoints – sensor structures, sensing materials, pattern design and bio-applications. The goal is to apply emerging materials and novel designs of high-sensitivity and high-resolution magnetoresistive sensors based on the planar Hall effect. The NanoFrazor is expected to be used for a number of further applications ranging from 3D patterns to local thermal modifications of materials, as the tool will be shared between different groups.
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The approach of using two hard mask layers for pattern transfer of high resolution features in PPA resist written with the NanoFrazor has already been proven to be quite successful. Half-pitch patterns of 27.5 nm and 18 nm in Si were demonstrated and published in Nano Letters in 2013 and JVSTB in 2015, respectively. We collaborated again with IBM Research Zurich to analyze and optimize this process even further. We achieved etched nanowires in Si down to 7 nm width and a pitch as small as 11 nm half-pitch after etching. The details have been published very recently in ACS…
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A NanoFrazor Scholar was delivered to Prof. Chun-hsien Chen’s group at the National Taiwan University in the department of Materials Chemistry and Analytical Chemistry. Their main research includes molecular electronics, surface modification and characterization and molecular self-assembly. The NanoFrazor will initially be used to fabricate electrodes to contact single wall nanotubes with molecules self-assembled on them. Professor Chen’s group at NTU is highly dynamic and exceptionally productive. They demonstrated this when they successfully aligned and wrote contacts onto carbon nanotubes already during the tool installation itself.
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In 2016, Samuel Zimmermann and Diederik Balkenende from EPFL and Adolph Merkle institute won $1000 with the 3rd place of the Young Researchers Idea Competition at the Thermal Probe Workshop. Since then, the duo realized their creative idea with the NanoFrazor at EPFL and recently published the corresponding article “Nanopatterning of a stimuli-responsive fluorescent supramolecular polymer by thermal scanning probe lithography” in the journal ACS Applied Materials & Interfaces. In this article, they show remarkable control over fluorescence contrast and intensity and explain the observed effects by kinetic trapping of the dissociated state of the supramolecular polymer due to ultra-rapid…
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First-of-its-kind solution combines high resolution and 3D printing capabilities of SwissLitho NanoFrazor system with high throughput and cost-effectiveness of EVG's SmartNIL® technology ST. FLORIAN, Austria and ZURICH, Switzerland, October 9, 2017—EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, and SwissLitho AG, a manufacturer of novel nanolithography tools, today announced a joint solution to enable the production of 3D structures down to the single-nanometer scale. Initially demonstrated within the “Single Nanometer Manufacturing for Beyond CMOS Devices (SNM)” project funded by the Seventh Framework Program of the European Union, the joint…
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The Utah Nanofab at the University of Utah in Salt Lake City is home of a NanoFrazor Explore since the end of August. Prof. Pierre-Emmanuel Gaillardon lead the successful grant application to purchase the NanoFrazor for the University of Utah. The NanoFrazor Explore will be used by several research groups for nanowire applications and the fabrication of other nano-devices.
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The NanoFrazor Scholar is our newest NanoFrazor system, available only since this year. We are happy to announce that the first NanoFrazor Scholar system was recently installed successfully in Dresden, Germany, at the Leibniz Institute for Solid State and Materials Research in the Institute for Metallic Materials (IMW). The group "Quantum Materials and Devices" PD Dr. Andy Thomas specializes in nanomagnetic layers, semiconductor nanowires and artificial synapses. The Scholar is planned to be used for fabricating magnetic tunnel junctions and nanowire-based devices. The unique In-situ imaging, markless overlay and stitching features of the NanoFrazor will enable the fabrication of such devices through a much simpler…
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