The NanoFrazor Explore has been developed for researchers who want to have easy and flexible access to high-resolution nanometer-sized geometries of almost any kind. It is based on Thermal Scanning Probe Lithography, a technology developed at IBM Research Zurich, which uses an ultra-sharp tip to evaporate a thermally sensitive resist. The tool has a wide range of applications in the fields of nanophotonics, nanooptics, nanomagnetism, nanoelectronics, plasmonics, etc.
The NanoFrazor Explore is specifically designed for R&D, and incorporates all key features of Thermal Scanning Probe Lithography including 3D patterning of nanostructures with high resolution and simultaneous in-situ metrology. The technology is compatible with standard pattern transfer processes like reactive-ion etching, electroplating and lift-off.
The housing has all necessary components integrated, and can be installed in any laboratory or clean-room. Vacuum and high-voltages are not required, keeping the requirements on infrastructure very low. The tool is easy-to-use, basic skills for patterning and imaging can be learned within a day.