The NanoFrazor software is a complete solution for performing high-resolution 2D and 3D (grayscale) lithography. It supports traditional lithography (.GDS) and AFM (.top) file formats for easy integration into established user workflows. An interactive, graphical approach uses the NanoFrazor’s surface topography measuring capability for precise overlay – aligning patterns with surface features.
The software is integrated into the widely-used Igor Pro software platform. This provides advanced users with access to Igor’s extensive mathematical libraries and scripting capabilities. In addition to the core NanoFrazor patterning and imaging functionality, the software also handles the optical microscope, the gas control, humidity and temperature monitoring and all cantilever calibrations.